公开(公告)号：FR2280134A1

公开(公告)日：1976-02-20

申请号：FR7518980

申请日：1975-06-09

Applicant: IBM

Inventor： HALL ALAN V ,  PERKINS MERLYN H ,  PFEIFFER HANS C ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  G05D25/02 ,  H05B41/38

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.

公开(公告)号：CA982234A

公开(公告)日：1976-01-20

申请号：CA174374

申请日：1973-06-19

Applicant: IBM

Inventor： HALL ALAN V ,  WOODARD OLLIE C

IPC: H01J37/06 ,  G05F1/46 ,  H01J9/227 ,  H01J37/24 ,  H01J37/304 ,  H03F17/00

公开(公告)号：CA1041178A

公开(公告)日：1978-10-24

申请号：CA231509

申请日：1975-07-15

Applicant: IBM

Inventor： HALL ALAN V ,  PERKINS MERLYN H ,  PFEIFFER HANS C ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/31

Abstract: METHOD AND APPARATUS FOR CONTROLLING BRIGHTNESS AND ALIGNMENT OF A BEAM OF CHARGED PARTICLES A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target. In operation the beam is applied to the target for a predetermined period of time. When the beam is not applied to the target it's positioning on the target is aligned and the brightness of the beam is controlled. This aligning and controlling occurs during a predetermined period of time between the periods of time when the beam is actually applied to the target. Apparatus for maintaining the substantially uniform current density of the beam of charge particles is also provided.

公开(公告)号：DE2525205A1

公开(公告)日：1976-02-12

申请号：DE2525205

申请日：1975-06-06

Applicant: IBM

Inventor： PERKINS MERLYN H ,  HALL ALAN V ,  PFEIFFER HANS C ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/24 ,  G06K15/20

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.