公开(公告)号：JP2011082510A

公开(公告)日：2011-04-21

申请号：JP2010211611

申请日：2010-09-22

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： SOORIYAKUMARAN RATNAM ,  HART MARK WHITNEY ,  ALLEN ROBERT DAVID

IPC: H01L21/027 ,  C08G77/38 ,  C08L83/04

CPC classification number: G03F7/0752 ,  C09D7/1233 ,  C09D7/63 ,  G03F7/094

Abstract: PROBLEM TO BE SOLVED: To provide a method of flattening on a topography using molecular glass materials. SOLUTION: A flattened composition using molecular glass as a base for lithographic processing is disclosed. A process generally includes the steps of casting a planarizing composition containing at least one molecular glass and at least one solvent on a surface containing a lithographic structure and heating the flattened composition to a temperature higher than the glass transition temperature of at least one molecular glass. Exemplary molecular glass includes a polyhedral oligomeric silsesquioxane derivative, calixarene, a cyclodextrin derivative, and the other non-polymer macromolecules. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供使用分子玻璃材料在地形上平坦化的方法。 解决方案：公开了使用分子玻璃作为光刻加工的基底的扁平组合物。 方法通常包括以下步骤：将含有至少一种分子玻璃和至少一种溶剂的平面化组合物浇铸在含有平版印刷结构的表面上并将扁平化组合物加热至高于至少一种分子玻璃的玻璃化转变温度的温度。 示例性分子玻璃包括多面体低聚倍半硅氧烷衍生物，杯芳烃，环糊精衍生物和其它非聚合物大分子。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：AU2003251735A1

公开(公告)日：2004-02-25

申请号：AU2003251735

申请日：2003-07-02

Applicant: IBM

Inventor： HART MARK WHITNEY ,  KIM HO-CHEOL ,  MILLER ROBERT DENNIS ,  WALLRAFF GREGORY MICHAEL

IPC: B01L3/00 ,  G01N21/03

Abstract: A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.