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公开(公告)号：US3880524A
公开(公告)日：1975-04-29
申请号：US37354073
申请日：1973-06-25
Applicant: IBM
Inventor： DILL FREDERICK H , HAUGE PETER S
CPC classification number: G01B11/272 , G01B11/065 , G01N21/211
Abstract: An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analogdigital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.
Abstract translation: 公开了一种自动椭偏仪，其包括机械光学，电气和数字（计算机）部件。 机械光学部件包括光源，各种偏振元件（其中一个连续旋转），必需的孔和光检测器。 电气部件包括来自光检测器的信号，来自角轴编码器的触发脉冲和模拟数字转换器，并且以数字逻辑电路读取和分析的形式产生一串数字化数据。 数字（计算机）组件包括足够数量的逻辑电路来存储和执行相对简单的数据分析程序，其中适当地与数字组件，一个或多个打印输出和/或显示设备相关联。 为了促进椭圆运算的自动化，提供了一种样本对准系统，其包括入射光束中的点限定孔，具有能够围绕与光束源的轴线交叉的两个垂直轴旋转的能力的样本保持器 和检测器的轴线，以及一个四象限的光束偏移检测器，位于沿着检测器轴线的样品方便的距离处。 在系统的操作中，样品被适当地定向在两个旋转轴上，并且以反射光束路径中的连续纺丝分析仪传输的以光强度形式的数据以适当的角度间隔进行采样，以提供数字编码的数据 ，然后对数据进行数字傅里叶分析，以使样品的外推特性能够显示或输出。 整个操作顺序，即从样本插入到输出或显示，大约5-10秒左右。
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Patent Agency Ranking2.发明授权Gunn oscillator with p-n junction contact for fast low power on-off control 失效具有P-N接点的GUNN振荡器用于快速低功率开关控制
公开(公告)号：US3566306A
公开(公告)日：1971-02-23
申请号：US3566306D
申请日：1969-06-30
Applicant: IBM
Inventor： ESPOSITO RALPH M , HAUGE PETER S , LANZA CONRAD
Abstract: THE CONTROLLABLE OSCILLATOR INCLUDES A CONVENTIONAL GUNN OSCILLATOR FORMED OF A BODY OF N TYPE GALLIUM ARSENIDE WITH ORMIC CONTACTS AT BOTH ENDS. THE NOL PRODUCT FOR THE BODY IS AT LEAST TWICE THE CRITICAL VALUE FOR SUSTAINING DOMAIN NUCLEATION AND PROPAGATION. AN ABOVE-THRESHOLD VOLTAGE IS APPLIED TO THE BODY TO PRODUCE HIGH FREQUENCY OSCILLATIONS. THE OSCILLATIONS ARE CONTROLLED BY SIGNALS APPLIED TO A P TYPE CONTACT MADE TO THE BODY AT A DISTANCE D FROM THE AMOD SUCH THAT NOD IS LESS THAN THE CRITICAL VALUE FOR OSCILLATIONS. APPLICATION OF A REVERSE BIAS SIGNAL TO THIS REGION CAUSES THE OSCILLATIONS TO STOP AND A STABLE FIELD CONDITION TO BE PRODUCED WITH A HIGH FIELD NEAR THE ANODE.
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公开(公告)号：CA1010262A
公开(公告)日：1977-05-17
申请号：CA201979
申请日：1974-06-07
Applicant: IBM
Inventor： DILL FREDERICK H , HAUGE PETER S
Abstract: An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analog-digital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.
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公开(公告)号：CA1144418A
公开(公告)日：1983-04-12
申请号：CA362742
申请日：1980-10-20
Applicant: IBM
Inventor： AVIRAM ARI , CAHILL JOHN G , HAUGE PETER S , PENNINGTON KEITH S
Abstract: abstract An improved lithographic printing plate includes a substrate layer of a nonconducting, hydrophobic polyester, an intermediate film of conducting, hydrophilic material such as aluminum and a top protective film of relatively hard hydrophilic dielectric material, such as aluminum oxide. .A printing image is formed in the lithographic printing plate by an electroerosion process wherein erosion electrodes are pulsed with voltage to break down the dielectric in areas adjacent to the erosion electrodes and to evaporate or otherwise remove corresponding portions of the conducting film, thereby creating holes that extend through the dielectric and conducting films and that expose portions of the surface of the underlying hydrophobic substrate. YO978-036
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公开(公告)号：CA1048806A
公开(公告)日：1979-02-20
申请号：CA250134
申请日：1976-04-13
Applicant: IBM
Inventor： DILL FREDERICK H , HAUGE PETER S
IPC: G01J4/04 , G01B9/02 , G01B11/00 , G01B11/06 , G01B11/27 , G01B11/30 , G01N21/21 , G01J4/02 , G02F1/01
Abstract: ROTATING-COMPENSATOR ELLIPSOMETER Plane polarized light is reflected from a surface of a sample film to produce an elliptically polarized reflected beam. The reflected beam is passed sequentially through a rotating onequarter wave plate and a fixed analyzer which transmits a beam whose intensity varies as a function of the rotational angle of the plate. The transmitted beam impinges upon a photodetector which produces an electric signal proportional to the intensity of the transmitted light. The rotating one-quarter wave plate cyclically varies the polarization of the beam, so that the electrical signal, when numerically Fourier analyzed, provides Fourier coefficients having both sin.DELTA. and cos.DELTA. terms, where the ellipsometric parameter .DELTA. is the instantaneous phase difference between the parallel (RP) and perpendicular (RS) components of the electric vector of the elliptically polarized reflected beam; therefore, the phase difference .DELTA. is uniquely and unambiguously defined in a single measurement. Furthermore, the presence of both sin.DELTA. and cos.DELTA. terms permits .DELTA. to be determined more accurately than is possible with the prior art rotating-analyzer ellipsometer. Since the ellipsometric parameter ? is also uniquely defined ( ), properties of the sample film can be computed. Alternatively, the rotating quarter-wave plate may be placed in the path of the incident plane polarized beam.
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