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公开(公告)号：DE2963404D1
公开(公告)日：1982-09-16
申请号：DE2963404
申请日：1979-07-16
Applicant: IBM
Inventor： CHANG KENNETH , COSMAN DAVID CECIL , GARTNER HELMUT MATTHEW , HOEG JR ANTHONY JOHN
IPC: G03F7/09 , H01L21/033 , H01L21/306 , H01L21/3213 , H01L21/768 , H01L21/00 , G03F7/02 , H01L21/308 , H01L21/90
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