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公开(公告)号：JPH08188878A
公开(公告)日：1996-07-23
申请号：JP25256195
申请日：1995-09-29
Applicant: IBM
Inventor： SUTEIIBUN JIYOOJI BAABII , JIYONASAN DANIERU CHIYATSUPURU , RICHIYAADO ANSONII KONTEI , RICHIYAADO SHIYAO , JIEEMUSU ANSONII ONEIRU , NARAYAANA BUII SARUMA , DONARUDO REZURII UIRUSON , JIYASUTEIN WAI CHIYOU UON , SUTEIIBUN POORU ZUHOSUKI
IPC: C23C16/40 , C23C16/448 , C23C16/52 , H01L21/205 , H01L21/31 , H01L21/316
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