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公开(公告)号：JPS5496025A
公开(公告)日：1979-07-30
申请号：JP11247178
申请日：1978-09-14
Applicant: IBM
IPC: H01L21/30 , G03C1/72 , G03F7/022 , G03F7/30 , G03F7/32 , H01L21/027 , H01L21/302 , H01L21/3065 , H05K3/06
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