-
公开(公告)号：JPS6356919A
公开(公告)日：1988-03-11
申请号：JP12610687
申请日：1987-05-25
Applicant: IBM
Inventor： HIROYUKI HIRAOKA , JIEFUREI UIRIAMU RABADEII , JIEEMUZU SHII TANGU RII , SUKOTSUTO AASAA MAKUDONARUDO , KAARUTON GURANTO UIRUSON
IPC: H01L21/302 , G03F7/40 , H01L21/027 , H01L21/3065
Search Results
1
records
(took 0.02 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
