公开(公告)号：JPH03147317A

公开(公告)日：1991-06-24

申请号：JP26323090

申请日：1990-10-02

Applicant: IBM

Inventor： REIDO SUTAATO BENETSUTO ,  ARUBAATO ROJIYAASU ERINGUBOO ,  JIYOOJI GOODON JIFUOODO ,  KAATO RINDOSEI HARAA ,  JIYON SURATON MATSUKIROTSUPU ,  GARII SUTEWAATO SERIN ,  JIYOSHII SHINGU

IPC: C23F4/00 ,  C23C16/44 ,  C23C16/515 ,  H01J37/32 ,  H01L21/302

Abstract: PURPOSE: To sweep/remove particle contamination material from plasma, by applying a transverse wave inductive force to plasma discharge. CONSTITUTION: A laser 38 generates a laser light ray 40, and it is scanned with a mirror 39, of normal motor-driven, which is attached for scanning through a port 35 on a chamber wall surface 30 thus the inside of plasma processing device in the chamber wall surface 30 scan. With a detector 41 assigned in parallel to the second view port 35, the effectiveness of wave induction is judged by using the laser light ray, scattering from the laser light ray, detected with the detector 41, so that cleanness level for use of a device is judged. In order to generates spacer fluctuation in plasma electric potential required for sweep/removal of particle contamination material from the reaction vessel space in the chamber wall surface 30, just a low level microwave radiation is sufficient. As a means for inducing a transverse wave in process, sound wave, radiation pressure are also effective.

公开(公告)号：JPH04340404A

公开(公告)日：1992-11-26

申请号：JP26866491

申请日：1991-09-20

Applicant: IBM

Inventor： TONII FUREDERITSUKU HAINTSU ,  GEIRII SUTEYUWAATO SERUUIN ,  JIYOSHII SHINGU ,  JIYON ANSONII SUPINATSUTEI JIY

IPC: B44C1/22 ,  C23F4/00 ,  G01B11/06 ,  H01L21/66

Abstract: PURPOSE: To monitor the deposition, reaction, modification and removing processes of a material on the spot with high accuracy by irradiating a portion of the surface of the material with a laser beam of predetermined frequency and observing the reflected beam at a specified frequency. CONSTITUTION: A pulse of frequency ω from a laser 12 is polarized through a polarizer 14 and passed through a filter 15 passing only the component of frequency ω and removing other components, especially second harmonic 2ω. A laser beam is reflected on a mirror 17 toward a desired portion of a sample 19 from which a coherent beam of frequency 2ω is generated and directed toward is mirror 21 together with the beam of frequency ω. The mirror 21 transmits the majority of wave of frequency ω and reflects the harmonic 2ω. A polarization beam splitter 24 divides the reflected wave into two through a polarization division and the divided waves are delivered on two detection channels. Outputs from photodetectors 27, 31 are then measured for each channel by means of high rate gate integrators 32, 33. A comparison circuit 34 subtracts the electric outputs of respective channels from each other to produce a difference signal which is used for monitoring the physical processing of the tample 19.