Patent search ap:("IBM") AND inv:"JIYURI ROSUTEISURABU PARAZUKAK" Page 1

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发明专利
PLASMA RESISTANT POLYMER MATERIAL AND MAKING THEREOF 失效

公开(公告)号：JPS61219034A

公开(公告)日：1986-09-29

申请号：JP28953885

申请日：1985-12-24

Applicant: IBM

Inventor： EDOWAADO DAAKO BABITSUCHI , MAIKURU HATSUAKISU , SUKOTSUTO RORENSU JIEIKOBUZU , JIYURI ROSUTEISURABU PARAZUKAK , JIEIN MAAGARETSUTO SHIYOO , DEIBITSUDO FURANKU UITSUTOMAN

IPC: C08L61/00 , C08K5/549 , C08L33/00 , C08L33/02 , C08L61/04 , C08L61/06 , G03C1/00 , G03C1/72 , G03F7/004 , G03F7/038 , G03F7/26 , G03F7/38 , H01L21/027

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