公开(公告)号：GB2605325A

公开(公告)日：2022-09-28

申请号：GB202208666

申请日：2020-11-20

Applicant: IBM

Inventor： NING LI ,  JOEL DE SOUZA ,  STEPHEN BEDELL ,  DEVENDRA SADANA

IPC: H01L45/00

Abstract: A bottom electrode(110) is deposited on top of a substrate(105). A dielectric material layer(115) is deposited on top of the bottom electrode(110). A hole is created in the dielectric material layer(115). A lift off layer(116) is spun on and baked on the dielectric material layer(115). A photoresist layer(117) is spun on and baked on the lift off layer(116). UV lithography is performed to create an opening above the hole in the dielectric material layer(115). An Ag layer(120) is deposited on top of the remaining patterned dielectric material layer and the photoresist layer(117). A Germanium Antimony Telluride (GST) layer(130) is deposited on top of the Ag layer(120). A top electrode(140) is deposited on top of the GST layer(130). The Ag layer(120), the GST layer(130) and the top electrode(140) located on top of the photoresist layer(117) along with the photoresist layer(117) and the lift off layer(116) are removed.

公开(公告)号：GB2604555A

公开(公告)日：2022-09-07

申请号：GB202208762

申请日：2020-10-22

Applicant: IBM

Inventor： YOUNG-HYE NA ,  JANGWOO KIM ,  ROBERT DAVID ALLEN ,  JOEL DE SOUZA ,  JOHN COLLINS ,  DEVENDRA SADANA

IPC: H01M10/0568 ,  H01M4/38

Abstract: A battery includes a cathode with a metal halide and an electrically conductive material, wherein the metal halide acts as an active cathode material; a porous silicon anode with a surface having pores with a depth of about 0.5 microns to about 500 microns, and a metal on the surface and in at least some of the pores thereof; and an electrolyte contacting the anode and the cathode, wherein the electrolyte includes a nitrile moiety.