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公开(公告)号:DE1564151A1
公开(公告)日:1969-07-24
申请号:DEJ0030835
申请日:1966-05-14
Applicant: IBM
Inventor: FU FANG FRANK , NIEN YU HWA , JOHN WALKER EDWARD
IPC: H01L27/088 , H01L21/00 , H01L21/22 , H01L21/316 , H01L21/8234 , H01L21/8236 , H01L29/00 , H01L29/78 , H01L11/14
Abstract: A method for manufacturing a field-effect, isolated-barrier transistor, comprising the steps of: forming by diffusion separate parts, of a first type of conductivity, on the surface of an elementary semiconductor wafer of the opposite conductivity type; forming an insulating layer at least in the intermediate part of said surface lying between said diffused portions separated and defining a conduit channel therebetween, having a given surface potential the interfacial zone between said insulating layer and said intermediate portion of said surface. said wafer; and forming on said insulating layer a barrier electrode for applying electric fields to said intermediate surface portion; method characterized by the improvement comprising the step of passing through diffusion an impurity material of the acceptor type, through said insulating layer and until penetrating a narrow layer of said intermediate surface part before forming said barrier electrode, for control the surface potential in said interfacial zone. (Machine-translation by Google Translate, not legally binding)
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公开(公告)号:DE1489338A1
公开(公告)日:1968-12-19
申请号:DE1489338
申请日:1964-01-16
Applicant: IBM
Inventor: EARL MICHEL ALWIN , JOHN WALKER EDWARD
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