公开(公告)号：JPH0758375A

公开(公告)日：1995-03-03

申请号：JP13465094

申请日：1994-06-16

Applicant: IBM

Inventor： KEBIN ROBAATO KOFUEI ,  JIEEMUSU KENTO HAWAADO ,  TOTSUDO RANIA HIRUTON ,  MAIKERU ANDORIYUU PAAKAA

IPC: C23C14/14 ,  G01R33/09 ,  G11B5/39 ,  H01F10/00 ,  H01F10/32 ,  H01L43/08 ,  H01L43/10

Abstract: PURPOSE: To form a heterofilm where a plurality of ferromagnetic particles are buried in a matrix of nonmagnetic conductive substance by forming a discontinuous layer of ferromagnetic substance on a nonconductive substrate and coating the discontinuous layer with a layer of nonmagnetic conductive substance. CONSTITUTION: A single layer granular magnetoresistive MR film 10 is obtained by coating a nonconductive layer 13 formed on an appropriate substrate 11 with a discontinuous layer of ferromagnetic substance, e.g. NeFe or Co, and forming a ferromagnetic island or granular layer 15 thereon. The ferromagnetic substance layer 15 is formed by deposition or sputtering under ultrahigh vacuum conditions while raising the substrate temperature and mobility sufficient for forming particles of ferromagnetic substance on the layer 13 is attained. Subsequently, a continuous layer 17 of nonmagnetic conductive substance, e.g. Cu or Ag, is formed on the layer of ferromagnetic particles by cooling the substrate thus obtaining a granular MR film 10 where ferromagnetic particles are buried in a nonmagnetic conductive matrix 17.