公开(公告)号：JPH0744853A

公开(公告)日：1995-02-14

申请号：JP11160894

申请日：1994-05-25

Applicant: IBM

Inventor： RICHIYAADO HENRII AARAATO ,  JIEIMUZU KENTO HAWAADO ,  TOTSUDO RANIA HAIRUTON ,  MAIKERU ANDORIYUU PAAKAA ,  MUHAMADO INAIETO URAA

IPC: C23C14/08 ,  C23C14/58 ,  G11B5/64 ,  G11B5/65 ,  G11B5/66 ,  G11B5/85 ,  G11B5/851

Abstract: PURPOSE: To obtain a barium ferrite thin film having high magnetic characteristics, corrosion resistance and durability and intrinsic texture. CONSTITUTION: The thin film 60 has a front surface 65 and a base 67 forming a boundary with a substrate 70, is parallel with this substrate and is deposited by evaporation by reactive magnetron sputtering of a barium ferrite target in a coaxial sputtering system for orienting the sputtering target so as to face the substrate. This constitution exhibits the vapor deposition rate higher than the vapor deposition rate by the sputtering system to position the substrate perpendicular to the target on the circumference of the plasma without being limited by the powerful magnetic orientation perpendicular to the plane of the thin film.

公开(公告)号：JPH0758375A

公开(公告)日：1995-03-03

申请号：JP13465094

申请日：1994-06-16

Applicant: IBM

Inventor： KEBIN ROBAATO KOFUEI ,  JIEEMUSU KENTO HAWAADO ,  TOTSUDO RANIA HIRUTON ,  MAIKERU ANDORIYUU PAAKAA

IPC: C23C14/14 ,  G01R33/09 ,  G11B5/39 ,  H01F10/00 ,  H01F10/32 ,  H01L43/08 ,  H01L43/10

Abstract: PURPOSE: To form a heterofilm where a plurality of ferromagnetic particles are buried in a matrix of nonmagnetic conductive substance by forming a discontinuous layer of ferromagnetic substance on a nonconductive substrate and coating the discontinuous layer with a layer of nonmagnetic conductive substance. CONSTITUTION: A single layer granular magnetoresistive MR film 10 is obtained by coating a nonconductive layer 13 formed on an appropriate substrate 11 with a discontinuous layer of ferromagnetic substance, e.g. NeFe or Co, and forming a ferromagnetic island or granular layer 15 thereon. The ferromagnetic substance layer 15 is formed by deposition or sputtering under ultrahigh vacuum conditions while raising the substrate temperature and mobility sufficient for forming particles of ferromagnetic substance on the layer 13 is attained. Subsequently, a continuous layer 17 of nonmagnetic conductive substance, e.g. Cu or Ag, is formed on the layer of ferromagnetic particles by cooling the substrate thus obtaining a granular MR film 10 where ferromagnetic particles are buried in a nonmagnetic conductive matrix 17.

公开(公告)号：JPH07210832A

公开(公告)日：1995-08-11

申请号：JP26941494

申请日：1994-11-02

Applicant: IBM

Inventor： KEBIN ROBAATO KOFUI ,  ROBAATO EDOWAADO FUONTANA ,  JIEEMUSU KENTO HAWAADO ,  TOTSUDO RANIAA HIRUTON ,  MAIKERU ANDORIYUU PAAKAA ,  CHIN FUA TSUAN

IPC: G01R33/09 ,  G11B5/39 ,  H01L43/10

Abstract: PURPOSE: To eliminate the need for an additional structure means for fixing the magnetization direction in a ferromagnetic layer by forming an low-field MR magnetic sensor based on the GMR effect of a multilayered structure. CONSTITUTION: The multilayered magnetic structure 30 includes two layers 31, 33 consisting of a magnetic material. These layers are separated by a nonmagnetic layer 35. The nonmagnetic material layer 35 is an electrically conductive material or a sufficiently thin insulating material layer which enables the conduction of the conduction electrons between the magnetic material layers by a tunnel effect. The magnetic layers 31, 33 consist of ferromagnetic materials, such as NiFe ('Permalloy (R)'), which are Ni, Fe, Co or their alloy. The layers of the magnetic materials and the nonmagnetic materials are alternately formed by sputtering, etc., and the thicknesses of the individual layers are controlled by a quartz monitor, etc. The length of the magnetic structure 30 is several μm and is adequately about

公开(公告)号：JPH06326377A

公开(公告)日：1994-11-25

申请号：JP7349694

申请日：1994-04-12

Applicant: IBM

Inventor： KEBIN ROBAATO KOFUII ,  JIEEMUZU KENTO HAWAADO ,  TOTSUDO REENIE HIRUTON ,  MAIKERU ANDORIYUU PAAKAA

IPC: G01R33/09 ,  G11B5/39 ,  H01F10/08 ,  H01F10/14 ,  H01F10/32 ,  H01L43/08 ,  H01L43/10 ,  G01R33/06

Abstract: PURPOSE: To obtain a low magnetic field magnetoresistance sensor by the huge magnetoresistance effect by providing a magnetoresistance sensing elements containing a non-continuous layer made of ferromagnetic material buried in a non-magnetic conductive material. CONSTITUTION: A magnetoresistance(MR) sensing elements 41 in granular multilayer magnetic structure include a layer or plane of multiple platelike grains 31. The magnetic moment of the grains 31 is partially oriented along the inductive anisotropic axis as shown by an arrow 47 to be inducted in the MR sensing elements 41. The bias magnetic field by a bias layer 45 arrays the moment of the grains 31 in a desired direction so as to adjust the operating points of an MR sensor 40 to be a linear part of responsive characteristics. In such a constitution, the MR sensor 40 is suspended on a data truck 44 thereby enabling the magnetic field H in data transition 46 to be applied on the plane of the MR sensing elements 41.