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公开(公告)号：DE3676107D1
公开(公告)日：1991-01-24
申请号：DE3676107
申请日：1986-03-19
Applicant: IBM
Inventor： BABU SURYADEVARA VIJAYAKUMAR , HOFFARTH JOSEPH GERARD , KNOLL ALLAN ROBERT , MLYNKO WALTER EUGENE , REMBETSKI JOHN FRANCIS
IPC: H01L21/302 , C09K13/00 , H01L21/306 , H01L21/3065 , H01L21/311 , C23F1/12 , B44C1/22 , C23C4/04
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