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公开(公告)号:DE3769484D1
公开(公告)日:1991-05-29
申请号:DE3769484
申请日:1987-01-16
Applicant: IBM
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公开(公告)号:DE3870378D1
公开(公告)日:1992-05-27
申请号:DE3870378
申请日:1988-08-02
Applicant: IBM
Abstract: A method for improving the adhesion of a polymer such as an epoxy resin to an electrolytic copper surface wherein the copper surface to be adhered is exposed to gas plasma containing a fluorohydrocarbon.
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公开(公告)号:DE68916068D1
公开(公告)日:1994-07-21
申请号:DE68916068
申请日:1989-02-03
Applicant: IBM
Inventor: HOFFARTH JOSEPH GERARD , WILEY JOHN PENNOCK
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公开(公告)号:DE69117381D1
公开(公告)日:1996-04-04
申请号:DE69117381
申请日:1991-07-01
Applicant: IBM
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公开(公告)号:DE3681077D1
公开(公告)日:1991-10-02
申请号:DE3681077
申请日:1986-05-28
Applicant: IBM
Abstract: The method for cleaning the cuts (24) machined into a workpiece (22) such as a printed electric circuit board, includes the steps of coating the cutting instrument (36) such as a drill bit, with a liquid tracer prior to the cutting operation. During the cutting operation, the liquid tracer becomes mixed with material such as an electrically insulating binder layer (50) disposed, e.g. between opposed metal plates (46, 48) of the workpiece (22). Any smear (52) of the insulating layer (50) upon exposed metal surfaces of the cut (24) contains elements of chemical compounds used in the tracer. After extraction of the cutting instrument (36) from the workpiece (22), the latter is placed in a plasma reactor (26) wherein the metal surfaces are etched to remove any smears and debris (52) of the insulation material found on the exposed metal surfaces. The tracer elements, such as deuterium and phosphorus are monitored in the effluent plasma of the reactor (26) to determine when the cleaning of the cuts (24) in the workpiece (22) is completed.
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公开(公告)号:DE69117381T2
公开(公告)日:1996-09-26
申请号:DE69117381
申请日:1991-07-01
Applicant: IBM
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公开(公告)号:DE68916068T2
公开(公告)日:1995-01-05
申请号:DE68916068
申请日:1989-02-03
Applicant: IBM
Inventor: HOFFARTH JOSEPH GERARD , WILEY JOHN PENNOCK
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公开(公告)号:DE3676107D1
公开(公告)日:1991-01-24
申请号:DE3676107
申请日:1986-03-19
Applicant: IBM
Inventor: BABU SURYADEVARA VIJAYAKUMAR , HOFFARTH JOSEPH GERARD , KNOLL ALLAN ROBERT , MLYNKO WALTER EUGENE , REMBETSKI JOHN FRANCIS
IPC: H01L21/302 , C09K13/00 , H01L21/306 , H01L21/3065 , H01L21/311 , C23F1/12 , B44C1/22 , C23C4/04
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