公开(公告)号：US3866038A

公开(公告)日：1975-02-11

申请号：US41547573

申请日：1973-11-13

Applicant: IBM

Inventor： KORTH HANS E

IPC: G06K7/10 ,  G01B11/24 ,  G01B11/30 ,  G01N21/892 ,  G01N21/956 ,  H01J3/14

CPC classification number: G01B11/303

Abstract: The flatness of a surface is measured using a scanning beam of light. For scanning the surface, a light beam is periodically deflected by a rotating polygonal mirror. The periodic displacement of the scanning beam reflected on the surface is fully compensated by its reflection on the same face of the polygonal mirror. As a consequence, a beam leaves the polygonal mirror substantially on the same path and in the opposite direction as the beam exiting from a light source such as a laser. If the scanning beam reflected from the surface impinges on an embossment or recess the reflected beam is displaced perpendicularly to the scan direction, this displacement not being compensated by its reflection on the polygonal mirror. This displacement, which is a function of the distance of the scanned point from a perfectly plane surface, is sensed by a linear array of photodetectors.

Abstract translation: 使用扫描光束测量表面的平坦度。 为了扫描表面，光束被旋转的多面镜周期性地偏转。 反射在表面上的扫描光束的周期性位移通过其在多面镜的相同面上的反射被完全补偿。 因此，光束离开多面镜基本上在与从诸如激光器的光源射出的光束相同的路径上并且沿相反的方向离开。 如果从表面反射的扫描光束照射在压纹或凹陷上，则反射光束垂直于扫描方向移动，该位移不被其在多面镜上的反射补偿。 通过光电检测器的线性阵列检测作为扫描点与完全平面的距离的函数的位移。

公开(公告)号：FR2413644A1

公开(公告)日：1979-07-27

申请号：FR7833626

申请日：1978-11-21

Applicant: IBM

Inventor： KORTH HANS E ,  SCHEDEWIE FRANZ

IPC: G01J3/36 ,  G01J3/22 ,  G01J3/28