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公开(公告)号：GB2511665B
公开(公告)日：2018-06-27
申请号：GB201408327
申请日：2012-11-02
Applicant: IBM
Inventor： KUANG-JUNG CHEN , WU-SONG S HUANG , SEN LIU , STEVEN J HOLMES , GREGORY BREYTA
IPC: G03F7/004 , G03F7/028 , G03F7/11 , G03F7/26 , H01L21/027
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