Patent search ap:("IBM") AND inv:"KUPSTIS JOHN DEMOSTHENES" Page 1

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发明专利
DEPOSITION METHOD USING AN ENERGETIC PARTICLE BEAM 未知

公开(公告)号：DE3065501D1

公开(公告)日：1983-12-15

申请号：DE3065501

申请日：1980-04-25

Applicant: IBM

Inventor： CUOMO JEROME JOHN , GAMBINO RICHARD JOSEPH , HARPER JAMES MCKELL EDWIN , KUPSTIS JOHN DEMOSTHENES

IPC: C23F4/00 , C23C14/34 , C23C14/46 , C23C15/00 , H01J37/36

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