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公开(公告)号:JPH04224824A
公开(公告)日:1992-08-14
申请号:JP5566691
申请日:1991-02-28
Applicant: IBM
Inventor: KURISHIYUNA GANDEII SAKUDEBU , JIYON PATORITSUKU HAMERU , RANII WAIIRIN KUUON , ROBAATO NIIRU RANGU , RIIOU RORENSU RAINHAN , HAABANZU SHINGU SAKUDEBU
IPC: C08G73/10 , C08L79/08 , H01L21/312 , H01L23/29 , H01L23/498 , H01L23/532 , H05K1/00
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公开(公告)号:JPH03204649A
公开(公告)日:1991-09-06
申请号:JP32135990
申请日:1990-11-27
Applicant: IBM
IPC: C08F2/46 , C08G73/10 , C08K5/23 , C08K5/28 , C08L79/08 , G03F7/038 , G03F7/039 , G03F7/075 , G03F7/26 , H01L21/027 , H01L21/30
Abstract: PURPOSE: To attain thermal stabilization by using a specified bis-(3-amino-4- hydroxyphenyl) compd., a diacid anhydride such as specified bis-(3,4- dicarboxyphenyl) anhydride or aliphatic tetracarboxylic acid anhydride and a photoactive compd. CONSTITUTION: This photosensitive polyimide compsn. consists of bis-(3-amino-4- hydroxyphenyl) compd. represented by formula I, a diacid anhydride such as bis-(3,4-dicarboxyphenyl) anhydride represented by formula II or aliphatic tetracarboxylic acid anhydride and a photoactive compd. such as bisazide. In the formula I, Q is -O-, -S-, etc. In the formula II, Z is -O-, -S-, -O-Ar-S-Ar-O, etc. Thermal stabilization is attained.
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