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公开(公告)号:JPS60212386A
公开(公告)日:1985-10-24
申请号:JP5259885
申请日:1985-03-18
Applicant: Ibm
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公开(公告)号:JPS60219089A
公开(公告)日:1985-11-01
申请号:JP2214185
申请日:1985-02-08
Applicant: IBM
Inventor: KURISHIYUNA GANJII SACHIDEBU , SUCHIIBUN ANSONII SHIA , KEISU SAMIYUERU PENINTON , MITSUCHIERU SHIMONZU KOOEN
IPC: B41M5/24
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公开(公告)号:JPS60147390A
公开(公告)日:1985-08-03
申请号:JP24354084
申请日:1984-11-20
Applicant: IBM
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公开(公告)号:JPH04230050A
公开(公告)日:1992-08-19
申请号:JP13058791
申请日:1991-05-02
Applicant: IBM
Inventor: MAIKERU FURANKU SHINA , MITSUCHIERU SHIMONZU KOOEN , EFURAIMU BEMISU FURINTO , KAATO RUDORUFU GURIIBU , DAGURASU JIYOO HOORU , KENESU POORU JIYAKUSON , MODESUTO MAIKERU OPURISUKO
IPC: H01L21/30 , G02B6/42 , H01L21/027 , H01L21/68 , H01S5/00
Abstract: PURPOSE: To provide a highly accurate passive positioning technique suitable for positioning the several sets of objects, before providing objects on an mounting surface. CONSTITUTION: By optically positioning a reference mark 516 marked on a transparent positioning plate 500, a laser 512 and the reference marks 515 and 517 marked on a fiber carrier 511, the transparent positioning plate 500, the laser 512 and the fiber carrier 511 (one set of objects) are passively positioned. A set of the passively positioned objects are temporarily fixed by a vacuum source 504. Thus, positioning is performed accurately.
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公开(公告)号:JPS5488037A
公开(公告)日:1979-07-12
申请号:JP13463278
申请日:1978-11-02
Applicant: IBM
Inventor: KII YUN AAN , MITSUCHIERU SHIMONZU KOOEN , JIYON BINSENTO PAWAAZU , RUGUUJIYOU TAO
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