公开(公告)号：CA1114071A

公开(公告)日：1981-12-08

申请号：CA334792

申请日：1979-08-30

Applicant: IBM

Inventor： ELDRIDGE JEROME M ,  LEE WEN-YAUNG ,  SCHWARTZ GERALDINE C

IPC: H01L21/302 ,  C23C8/12 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/316 ,  H01L21/3205 ,  H01L21/3213 ,  H01L23/52 ,  H05K1/00

Abstract: STABILIZATION PROCESS FOR ALUMINUM MICROCIRCUITS WHICH HAVE BEEN REACTIVE-ION ETCHED Aluminum microcircuits which have been prepared by reactiveion etching are stabilized against open circuits and short circuits by treating the microcircuits in an oxygen-containing atmosphere at a temperature of from about 200.degree.C to about 450.degree.C. SA978017

公开(公告)号：DE2964545D1

公开(公告)日：1983-02-24

申请号：DE2964545

申请日：1979-08-23

Applicant: IBM

Inventor： ELDRIDGE JEROME MICHAEL ,  LEE WEN-YAUNG ,  SCHWARTZ GERALDINE COGIN

IPC: H01L21/302 ,  C23C8/12 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/316 ,  H01L21/3205 ,  H01L21/3213 ,  H01L23/52 ,  C23F7/06 ,  C23F1/00 ,  C23C15/00 ,  H01L21/88

Abstract: Aluminium microcircuits which have been prepared by reactive-ion etching are stablized against open circuits and short circuits by treating the microcircuits in an oxygen-containing atmosphere at a temperature of from 200 DEG C to 450 DEG C.

公开(公告)号：CA1227571A

公开(公告)日：1987-09-29

申请号：CA478634

申请日：1985-04-09

Applicant: IBM

Inventor： BARTON ROGER W ,  COUFAL HANS J ,  JIPSON VICTOR B ,  LEE WEN-YAUNG

IPC: B41M5/26 ,  G11B7/00 ,  G11B7/004 ,  G11B7/0045 ,  G11B7/243 ,  G11B7/257 ,  G11B9/00 ,  G11B11/00 ,  G11B7/24 ,  G11C13/04

Abstract: OPTICAL RECORDING BY ENERGY-INDUCED FRACTIONATION AND HOMOGENIZATION A method of and structure for optical recording by energy-induced homogenization or fractionation is disclosed. When the method involves fractionation, a film is provided that contains a homogeneous mixture of a matrix material and an incident energy absorbing material. A spot on the film is treated with sufficient energy in the form of electric fields, radiation or heat, or combinations thereof to effect fractionation and/or homogenization of the film which will undergo further physical state transition only under treatment with additional energy. In a preferred embodiment, the fractionation is effected by laser radiation. The laser irradiated spot becomes inhomogeneous and can be detected by the resulting changes in its optical properties. When the method involves homogenization, a film is provided that contains a inhomogeneous mixture. The energy treated spot in this case becomes homogeneous without undergoing a phase transition between the amorphous and crystalline phases. Numerous combinations of fractionation and homogenization can result in the writing and erasing of information in a storage device.