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公开(公告)号：DE3271595D1
公开(公告)日：1986-07-10
申请号：DE3271595
申请日：1982-12-20
Applicant: IBM
Inventor： HATZAKIS MICHAEL , LIUTKUS JOHN JOSEPH , PARASZCZAK JURIJ ROSTYSLAV , SHAW JANE MARGARET
IPC: G03F7/26 , C08F12/00 , C08F12/16 , G03F7/038 , H01L21/027 , G03F7/10
