LATERAL P-I-N HETERO-JUNCTION DEVICE AND FORMATION METHOD THEREOF

    公开(公告)号:JPH05160427A

    公开(公告)日:1993-06-25

    申请号:JP14184292

    申请日:1992-06-03

    Applicant: IBM

    Abstract: PURPOSE: To provide a lateral PIN hetero-junction device, possessed of a stepped hetero-junction region and a sloping diffused region. CONSTITUTION: A III-V hetero-structure 10, which comprises a substrate 12, an intrinsic layer 14, and an upper layer 16 is provided. The band gap energy of the intrinsic layer 14 is smaller than that of the upper layer 16, and a hetero- junction 32 is formed between the intrinsic layer 14 and the upper layer 16. Then, a contact material 22 which contains a p-type dopant and a contact material 28 which contains an n-type dopant are attached to the upper layer 16, and the dopants are diffused by annealing at the same time so as to penetrate through a hetero-junction. As a result, compound semiconductors which form a hetero-junction is mixed in composition in diffused regions 34 and 36.

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