公开(公告)号：JPH0683049A

公开(公告)日：1994-03-25

申请号：JP2114693

申请日：1993-02-09

Applicant: IBM

Inventor： MARII ANGEROPUUROSU ,  DANIERU JII BAAGAA ,  JIEFURII DABURIYUU RABADEI ,  ERITSUKU DEII PAAFUEKUTO ,  MAASA AI SANCHIESU ,  SARII EI SUWANSON ,  UIRII FUORUKUSEN

IPC: G03F7/027 ,  C08F283/04 ,  C08G73/10 ,  G03F7/028 ,  G03F7/038 ,  G03F7/38 ,  G03F7/40 ,  H01L21/027

Abstract: PURPOSE: To provide an improved method for forming a negative image of a photosensitive polyimide having an improved wall surface angle on a substrate. CONSTITUTION: This forming method of the negative image of the polyimide includes (a) a process for coating the substrate with a coating film containing a polyamine acid ester and a photoinitiator, (b) a process for exposing the coating film corresponding to an image with radiation to make a polyamine acid ester insoluble corresponding to the image, (c) a process for developing the image, (d) a process for allowing the coating film to contact with a base and (e) a process for making the polyamine acid ester to an imide by heating the coating film.