Saved successfully
Save failed
Saved Successfully
Save Failed
公开(公告)号：DE3485678D1
公开(公告)日：1992-06-04
申请号：DE3485678
申请日：1984-06-20
Applicant: IBM
Inventor： DIMILIA VINCENT , MALDONADO JUAN RAMON , SPEIDELL JAMES LOUIS , WARLAUMONT JOHN MICHAEL
IPC: B23Q3/08 , B23Q3/18 , G03F7/20 , H01L21/00 , H01L21/67 , H01L21/683 , H05K13/00
