公开(公告)号：CA1163538A

公开(公告)日：1984-03-13

申请号：CA356809

申请日：1980-07-23

Applicant: IBM

Inventor： GRANDIA JOHANNES ,  MCCHESNEY WILLIAM G ,  SANTINI HUGO A E ,  TURK HAROLD L

IPC: C30B19/06 ,  C30B25/12 ,  H01F41/28 ,  H01L21/208 ,  H01L21/368

Abstract: A HOLDER FOR LIQUID PHASE EPITAXIAL GROWTH A holder for liquid phase epitaxial (LPE) growth which eliminates mesas on the surface of the film is described. The holder has two legs to which a ring is connected. The ring has holding means so that it can hold one wafer or two wafers back-to-back. One of the two legs extends vertically below the first ring. In a preferred embodiment a second ring having holding means for a pair of wafers back-to-back is attached to the elongated leg. This holder structure prevents a film from the liquid melt from forming when the holder is withdrawn from the liquid growth solution, thereby eliminating the formation of mesas which occur when the film ruptures. SA979002