Abstract:
PROBLEM TO BE SOLVED: To obtain a method, a system and a computer program for providing information for correlating the edges of a layout shape to a critical area of design and defects so that a designer can improve the sensitivity of design to various types of faults. SOLUTION: The method, the apparatus and the computer program for visually indicating interaction between one or more edges of a design that contribute a pattern of a determined critical area are provided. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
Methods, systems and program products are disclosed for selectively scaling (100) an integrated circuit (IC) design (200): by layer, by unit, or by ground rule, or a combination of these (130). The selective scaling technique can be applied in a feedback loop (408) with the manufacturing system (400) with process and yield feedback (300), during the life of a design, to increase yield in early processes in such a way that hierarchy is preserved. The invention removes the need to involve designers in improving yield where new technologies such as maskless fabrication are implemented.