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公开(公告)号：EP1719181A4
公开(公告)日：2010-08-25
申请号：EP04702191
申请日：2004-01-14
Applicant: IBM
Inventor： ANGYAL MATTHEW , HICHRI HABIB , LEE JIA , MCHERRON DALE , NYE HENRY A III
IPC: H01L29/00 , C23C16/40 , C23C16/455 , H01L21/316
CPC classification number: H01L21/31633 , C23C16/401 , C23C16/45523 , H01L21/02126 , H01L21/02164 , H01L21/022 , H01L21/02211 , H01L21/02216 , H01L21/02274
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