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公开(公告)号：DE2654416A1
公开(公告)日：1977-07-07
申请号：DE2654416
申请日：1976-12-01
Applicant: IBM
Inventor： BHATIA HARSARAN SINGH , CALHOUN HARRY CHARLES , MELHADO ROBERT LEONARD , SCHNITZEL RANDOLPH HUFF
IPC: H01L29/872 , H01L21/28 , H01L21/285 , H01L29/47 , H01L21/24 , H01L29/48
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