公开(公告)号：FR2339884A1

公开(公告)日：1977-08-26

申请号：FR7639691

申请日：1976-12-23

Applicant: IBM

Inventor： LIN BURN J ,  MENTESANA JOHN S ,  SANTY WILLIAM G ,  WILCZNSKI JANUSZ S

IPC: H01L21/027 ,  G03B27/20 ,  G03F7/20 ,  H01L21/683 ,  G03F9/00 ,  G03B27/18 ,  H01L21/68

Abstract: A jig for positioning an image mask and image receiving medium which includes a housing having a central bore, first means within the bore for supporting a mask or image receiving medium, a flexible diaphragm, second means for drawing vacuum, and a third means for applying superatmospheric pressure on one side of the diaphragm to deform it towards the first means to ensure proper positioning of the mask and image receiving medium. Also, the process for positioning the mask and image receiving medium is provided.