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公开(公告)号：DE2617483A1
公开(公告)日：1976-12-09
申请号：DE2617483
申请日：1976-04-22
Applicant: IBM
Inventor： HARVILCHUCK JOSEPH MATTHEW , LOGAN JOSEPH SKINNER , METZGER WILLIAM CLIFFORD , SCHAIBLE PAUL MARTIN , RISEMAN JACOB , SCHWARTZ GERALDINE COGIN
IPC: C23F4/00 , H01L21/3065 , H01L21/32 , H01L21/3213 , H05K3/08 , C23C15/00
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