Patent search ap:("IBM") AND inv:"MICHAELIDES DEMETRIOS" Page 1

1.

发明专利
APPARATUS FOR MEASURING SEMICONDUCTOR SURFACE POTENTIAL AND IMPURITY CONCENTRATION 未知

公开(公告)号：DE3161411D1

公开(公告)日：1983-12-22

申请号：DE3161411

申请日：1981-04-10

Applicant: IBM

Inventor： CORCORAN RICHARD ALAN , KEENAN WILLIAM ANDREW , MICHAELIDES DEMETRIOS , YUN BOB HONG

IPC: G01N27/00 , G01N27/04 , G01R31/26 , H01L21/66

Patent Agency Ranking