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公开(公告)号:SG47343A1
公开(公告)日:1998-04-17
申请号:SG1995000277
申请日:1995-04-18
Applicant: IBM
Inventor: WU ANTHONY WAI , KAUFMAN JAMES HARVEY , DOERNER FRANCES , METIN SERHAT , MIRZAMAANI SEYYED MOHAMMAD T
Abstract: A thin film cobalt alloy magnetic recording disk (50) has a texturing layer (52) located between the disk substrate (51) and the top surface of the disk to provide texturing of the disk (50) at the head-disk interface. The texturing layer (52) is made up of generally contiguous clusters of aluminum nitride (AlN) with rounded upper surfaces. The AlN texturing layer (52) is formed by sputtering an Al target in the presence of N2 gas. The subsequently sputter-deposited layers replicate the upper surface of the contiguous AlN clusters, resulting in a textured surface at the head-disk interface. The AlN texturing layer (52) may also be sputter deposited above the magnetic layer (56) in the middle of the protective carbon overcoat (61-62). The density and size of the AlN clusters in the texturing layer (52), and thus the texture of the completed disk at the head-disk interface, are controlled by the amount of N2, the sputtering power and pressure, and the substrate (51) temperature.