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公开(公告)号：JPH07113842A
公开(公告)日：1995-05-02
申请号：JP24438593
申请日：1993-09-30
Applicant: IBM
Inventor： HIRANO TOSHIKI , KIMURA ATSUO , MORI SHINICHIRO
Abstract: PURPOSE: To provide a probe structure having a precise pitch by arranging plural cavities whose positions are adjusted to a contact point pad on a device when the probe structure is contacted with a semiconductor device of an inspec tion object, covering them with an elastic thin film, and arranging a conductive projecting part and a lead part on the thin film. CONSTITUTION: A silicon oxide coating film having a thickness of several thousand Å is formed on a silicon substrate 120, and a micropore is formed in a position adjusted to a contact point pad position on an LSI by photolithography. A part just under the micropore is selectively dug down by plasma ethching, and a cavity 140 is formed. Next, a spin coat is performed on the whole by an organic coating film layer 130 having a thickness of several μm, and a diaphragm is formed on the cavity. Next, a metallic lead 110 is formed, and a metallic projecting contact part 101 is formed by plating. An LSI 200 of an inspection object can be inspected by contacting a contact part 101 with its contact point pad 210 at inspection time.
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2.发明专利
公开(公告)号：JP2001195042A
公开(公告)日：2001-07-19
申请号：JP2000005290
申请日：2000-01-05
Applicant: IBM
Inventor： MORI SHINICHIRO
Abstract: PROBLEM TO BE SOLVED: To reduce noise of longitudinal stripes on a display screen by leveling variance in output voltage level due to a difference of characteristics among output amplifiers of source drivers. SOLUTION: This source driver 12 for a liquid crystal panel is equipped with an output amplifier switching means 10 which switches an output amplifier 8, amplifying a digital image signal converted into an analog signal by a digital- to-analog converter 82 and supplying it to source lines 74 of the liquid crystal panel 70, to another output amplifier at intervals of a specific time.
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