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公开(公告)号:DE69613656D1
公开(公告)日:2001-08-09
申请号:DE69613656
申请日:1996-10-28
Applicant: IBM
Inventor: FURUHATA TOMOTAKE , HIRANO TOSHIKI , SAWADA CHIHIRO
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公开(公告)号:DE69613656T2
公开(公告)日:2002-05-29
申请号:DE69613656
申请日:1996-10-28
Applicant: IBM
Inventor: FURUHATA TOMOTAKE , HIRANO TOSHIKI , SAWADA CHIHIRO
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公开(公告)号:JP2001324404A
公开(公告)日:2001-11-22
申请号:JP2000140439
申请日:2000-05-12
Applicant: IBM
Inventor: TAMURA HITOSHI , HAYAKAWA TATSUO , HIRANO TOSHIKI
IPC: G01M1/38 , F16F15/36 , G11B17/038 , G11B19/20 , G11B25/04
Abstract: PROBLEM TO BE SOLVED: To provide a balance correction device and correction method capable of surely and efficiently correcting dynamic balance and a disk assembling method. SOLUTION: A balance correction device 20' is constituted as follows. To a hard disk drive 10, in which a disk 1 and a spindle 2 are assembled on a base 4, an acceleration applied from an actuator 23 is worked to the tip 2a the spindle 2 by way of a holder plate 26' in one acceleration applying mechanism 22A and the acceleration applied from the actuator 23 works on the base part 2b of the spindle 2 by way of the base 4 in an acceleration applying mechanism 22B.
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公开(公告)号:JPH07113842A
公开(公告)日:1995-05-02
申请号:JP24438593
申请日:1993-09-30
Applicant: IBM
Inventor: HIRANO TOSHIKI , KIMURA ATSUO , MORI SHINICHIRO
Abstract: PURPOSE: To provide a probe structure having a precise pitch by arranging plural cavities whose positions are adjusted to a contact point pad on a device when the probe structure is contacted with a semiconductor device of an inspec tion object, covering them with an elastic thin film, and arranging a conductive projecting part and a lead part on the thin film. CONSTITUTION: A silicon oxide coating film having a thickness of several thousand Å is formed on a silicon substrate 120, and a micropore is formed in a position adjusted to a contact point pad position on an LSI by photolithography. A part just under the micropore is selectively dug down by plasma ethching, and a cavity 140 is formed. Next, a spin coat is performed on the whole by an organic coating film layer 130 having a thickness of several μm, and a diaphragm is formed on the cavity. Next, a metallic lead 110 is formed, and a metallic projecting contact part 101 is formed by plating. An LSI 200 of an inspection object can be inspected by contacting a contact part 101 with its contact point pad 210 at inspection time.
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公开(公告)号:JPH04369009A
公开(公告)日:1992-12-21
申请号:JP16525991
申请日:1991-06-11
Applicant: IBM
Inventor: FURUHATA TOMOTAKE , HIRANO TOSHIKI
IPC: B65H9/08 , G05D3/00 , G11B7/13 , G11B7/22 , H01J37/20 , H02N1/00 , H02N2/00 , H02N3/00 , H02N11/00
Abstract: PURPOSE: To provide a micro-positioning device having a sub-micron order operating range in each X and Y direction. CONSTITUTION: A pair of aluminum electrodes 3a and 3b are vaporized on a PZT pb(Zrx Ti1-x )O3 2 bound on a silicon wafer 1, and the PZT 2 is moved up and down so that the top end of a contact pin formed on the pair of aluminum electrodes 3a and 3b can be rotationally moved. This micro-actuator is arranged on a plane like a multi array, and a driving member 15 arranged on the upper face of this micro-actuator array is moved to right and left directions so that positioning can be attained.
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公开(公告)号:JPH06246231A
公开(公告)日:1994-09-06
申请号:JP2875093
申请日:1993-02-18
Applicant: IBM
Inventor: HIRANO TOSHIKI , FURUHATA TOMOTAKE
Abstract: PURPOSE: To provide a microactuator suitable for a piezoelectric film by providing the microactuator with a first voltage pattern of a sawtooth waveform between electrode pairs on one side of a wall-like member and a second voltage pattern inverted in polarity between the electrode pairs on the other side. CONSTITUTION: A downwardly facing electric field is generated between the electrode pairs 3a and 4 and an upwardly facing electric field is generated between the electrode pairs 3b and 4 and the magnitude thereof increases gradually during the time from the time 0 to t1. Then, a PZT film 1 held between the electrode pairs 3a and 4 elongates gradually and a PZT film 1 held between the electrode pairs 3b and 4 shrinks gradually. Consequently, the wall-like member 2 moves rightward. The direction of the electric field inverts at the time t1 and the PZT film 1 between the electrode pairs 3a and 4 shrinks rapidly and the PZT film 1 between the electrode pairs 3b and 4 elongates rapidly. The wall-like member 2 rapidly moves leftward. An object 8 existing above the wall-like member 2 is moved rightward by repeating such operations.
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公开(公告)号:JPH09146708A
公开(公告)日:1997-06-06
申请号:JP29080195
申请日:1995-11-09
Applicant: IBM
Inventor: FURUHATA TOMOTAKE , HIRANO TOSHIKI , SAWADA CHIHIRO
Abstract: PROBLEM TO BE SOLVED: To obtain a driving method and a touch input method for the touch panel which make it easy to recognize a double touch on the touch panel by tapping different positions with a 1st and a 2nd depressing means and judging whether or not the double tapping is done at a desired position. SOLUTION: The index fingers 34 is pressed against the inside of the frame of an icon 36 and the position where the index finger 34 is placed is outputted from the touch panel 32 (a). Then while the index finger 34 is depressed against the icon 36 on the touch panel 32, another position on the touch panel 32 is tapped with the middle finger 40. The touch panel 32 outputs the position indicated with the tip of the arrow 42 in a figure, i.e., a position nearby the mid-point on the line connecting the index finger 34 and middle finger 40 (b). When the index finger 34 is placed only on the icon 36 on the touch panel 32, the touch panel 32 outputs the position where the index finger 34 is placed as shown with the tip of an arrow 44, so that the double tapping is recognized (c).
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公开(公告)号:JPH09161394A
公开(公告)日:1997-06-20
申请号:JP31880795
申请日:1995-12-07
Applicant: IBM
Inventor: HIRANO TOSHIKI
IPC: F16F15/36 , G01M1/20 , G11B17/038 , G11B19/20 , G11B33/08
Abstract: PROBLEM TO BE SOLVED: To easily adjust the rotational balance of a disk fixedly mounted within a hard disk drive with high accuracy in a stage for assembling the device. SOLUTION: The change of the force generated in a certain radial direction B of the disk 12 fixed to a revolving shaft 24 in the hard disk drive device 20 with lapse of time is measured by a piezoelectric element 16 at the time the disk 12 temporally fixed to the revolving shaft 24 by inserting the central hole of the disk 12 onto the revolving shaft 24 is revolved with the revolving shaft 24 in the method for adjusting the rotational balance which adjusts the rotational balance of the disk 12. This method decreases the absolute value of the measured force to the specified threshold value or below by imparting the acceleration in the prescribed radial direction to the revolving shaft 24 by the same piezoelectric element 16 in accordance with the measured change of the force with lapse of time.
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