Patent search ap:("IBM") AND inv:"MURLEY PHILIP C" Page 1

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发明授权
Diffusion process 失效
Title translation: 扩散过程

公开(公告)号：US3490962A

公开(公告)日：1970-01-20

申请号：US3490962D

申请日：1966-04-25

Applicant: IBM

Inventor： DUFFY MICHAEL C , KENNEDY DAVID P , MURLEY PHILIP C , ARMSTRONG WILLIAM J , SEABOLDT JACK JAY

IPC: H01L21/00 , H01L21/22 , H01L29/00 , H01L7/44

CPC classification number: H01L21/22 , H01L21/00 , H01L29/00 , Y10S148/043 , Y10S148/106 , Y10S148/167

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