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公开(公告)号:CZ20011568A3
公开(公告)日:2001-11-14
申请号:CZ20011568
申请日:1999-10-27
Applicant: IBM
Inventor: GROVES ROBERT , JADUS DALE , NGUYER-NGOC DOMINIQUE , WALER KEITH
IPC: H01L21/331 , H01L21/768 , H01L21/8222 , H01L27/082 , H01L29/06 , H01L29/73 , H01L29/732
Abstract: A transistor array including a plurality of transistors. Each transistor includes an emitter. An emitter region contact overlies each emitter region. At least one base region underlies each emitter region and is common to a plurality of transistors in the array. At least one base contact overlies the at least one base region and is associated with each transistor. A plurality of the base contacts are common to at least two transistors in the array. At least one collector reach through is associated with each transistor. A collector reach through contact overlies each collector reach through. A buried layer subcollector region of electrically conducting material electrically connects the collector reach through region to the collector pedestal region of each transistor.