INDEPENDENTLY VOLTAGE CONTROLLED VOLUME OF SILICON ON A SILICON ON INSULATOR CHIP
    2.
    发明申请
    INDEPENDENTLY VOLTAGE CONTROLLED VOLUME OF SILICON ON A SILICON ON INSULATOR CHIP 审中-公开
    独立电压控制绝缘体芯片上硅的体积

    公开(公告)号:WO2012145097A2

    公开(公告)日:2012-10-26

    申请号:PCT/US2012028987

    申请日:2012-03-14

    CPC classification number: H01L21/2652 H01L21/76267 H01L29/1087

    Abstract: A semiconductor chip (100) has an independently voltage controlled silicon region (110) that is a circuit element useful for controlling capacitor values of eDRAM trench capacitors (140) and threshold voltages of field effect transistors (130) overlying the independently voltage controlled silicon region (110). A bottom, or floor, of the independently voltage controlled silicon region (110) is a deep implant (105) of opposite doping to a doping of a substrate of the independently voltage controlled silicon region (110). A top, or ceiling, of the independently voltage controlled silicon region (110) is a buried oxide (103) implant in the substrate. Sides of the independently voltage controlled silicon region are deep trench isolation (106). Voltage of the independently voltage controlled silicon region (110) is applied through a contact structure (107) formed through the buried oxide (103).

    Abstract translation: 半导体芯片(100)具有独立电压控制的硅​​区域(110),其是用于控制eDRAM沟槽电容器(140)的电容器值和覆盖独立电压控制硅区域(130)的场效应晶体管(130)的阈值电压的电路元件 (110)。 独立电压控制的硅​​区域(110)的底部或底面是与独立电压控制的硅​​区域(110)的衬底的掺杂相反的掺杂的深注入(105)。 独立电压控制的硅​​区域(110)的顶部或顶部是衬底中的掩埋氧化物(103)注入。 独立电压控制的硅​​区域的侧面是深沟槽隔离(106)。 独立电压控制的硅​​区域(110)的电压通过穿过掩埋氧化物(103)形成的接触结构(107)施加。

    Independently voltage controlled volume of silicon on a silicon on insulator chip

    公开(公告)号:GB2502480B

    公开(公告)日:2014-04-30

    申请号:GB201315408

    申请日:2012-03-14

    Applicant: IBM

    Abstract: A semiconductor chip has an independently voltage controlled silicon region that is a circuit element useful for controlling capacitor values of eDRAM trench capacitors and threshold voltages of field effect transistors overlying the independently voltage controlled silicon region. A bottom, or floor, of the independently voltage controlled silicon region is a deep implant of opposite doping to a doping of a substrate of the independently voltage controlled silicon region. A top, or ceiling, of the independently voltage controlled silicon region is a buried oxide implant in the substrate. Sides of the independently voltage controlled silicon region are deep trench isolation. Voltage of the independently voltage controlled silicon region is applied through a contact structure formed through the buried oxide.

    Unabhängig spannungsgesteuertes Siliciumvolumen auf einem Silicium-auf-Isolator-Chip

    公开(公告)号:DE112012001195T5

    公开(公告)日:2013-12-12

    申请号:DE112012001195

    申请日:2012-03-14

    Applicant: IBM

    Abstract: Ein Halbleiterchip (100) weist eine unabhängig spannungsgesteuerte Siliciumzone (110) auf, welche ein Schaltungselement ist, das zum Steuern von Kondensatorwerten von eDRAM-Grabenkondensatoren (140) und Schwellenspannungen von Feldeffekttransistoren (130) geeignet ist, welche über der unabhängig spannungsgesteuerten Siliciumzone (110) liegen. Ein unterer Teil oder Boden der unabhängig spannungsgesteuerten Siliciumzone (110) ist eine tiefe Implantation (105) entgegengesetzter Dotierung, bezogen auf eine Dotierung eines Substrats der unabhängig spannungsgesteuerten Siliciumzone (110). Ein oberer Teil oder eine Decke der unabhängig spannungsgesteuerten Siliciumzone (110) ist eine Implantation eines vergrabenen Oxids (103) in dem Substrat. Seiten der unabhängig spannungsgesteuerten Siliciumzone sind eine Tiefgrabenisolierung (106). Die Spannung der unabhängig spannungsgesteuerten Siliciumzone (110) wird durch eine Kontaktstruktur (107) angelegt, die durch das vergrabene Oxid (103) hindurch ausgebildet ist.

    Independently voltage controlled volume of silicon on a silicon on insulator chip

    公开(公告)号:GB2502480A

    公开(公告)日:2013-11-27

    申请号:GB201315408

    申请日:2012-03-14

    Applicant: IBM

    Abstract: A semiconductor chip (100) has an independently voltage controlled silicon region (110) that is a circuit element useful for controlling capacitor values of eDRAM trench capacitors (140) and threshold voltages of field effect transistors (130) overlying the independently voltage controlled silicon region (110). A bottom, or floor, of the independently voltage controlled silicon region (110) is a deep implant (105) of opposite doping to a doping of a substrate of the independently voltage controlled silicon region (110). A top, or ceiling, of the independently voltage controlled silicon region (110) is a buried oxide (103) implant in the substrate. Sides of the independently voltage controlled silicon region are deep trench isolation (106). Voltage of the independently voltage controlled silicon region (110) is applied through a contact structure (107) formed through the buried oxide (103).

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