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公开(公告)号：DE69030247D1
公开(公告)日：1997-04-24
申请号：DE69030247
申请日：1990-12-13
Applicant: IBM
Inventor： CHAUDHARI PRAVEEN , GAMBINO RICHARD JOSEPH , KOCH ROGER HILSEN , LAIBOWITZ ROBERT BENJAMIN , PATTON GARY LEE , SAI-HALASZ GEORGE ANTHONY , STORK JOHANNES M CORNELIUS
IPC: H01L29/165 , H01L21/331 , H01L23/532 , H01L29/205 , H01L29/73 , H01L29/737 , H01L39/22 , H01L39/24
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