公开(公告)号：BR7801031A

公开(公告)日：1978-12-12

申请号：BR7801031

申请日：1978-02-21

Applicant: IBM

Inventor： RYAN P ,  PFEIFFER H ,  WEBER E

IPC: H01J37/147 ,  H01J37/09 ,  H01J37/30 ,  H01L21/027 ,  H01L27/00

公开(公告)号：CA1054682A

公开(公告)日：1979-05-15

申请号：CA298796

申请日：1978-03-13

Applicant: IBM

Inventor： HALL A ,  WOODARD O ,  WEBER E ,  PERKINS M ,  PFEIFFER H

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/30

Abstract: METHOD AND APPARATUS FOR CONTROLLING BRIGHTNESS AND ALIGNMENT OF A BEAM OF CHARGED PARTICLES A beam of charged particles has its alignment and brightness controlled in accordance with the beam current. The measurements of the current and any corrections for alignment or brightness are made when the beam is not being applied to a target. The apparatus for maintaining substantially uniform brightness of the beam of charged particles has means for measuring the brightness of the beam. If the output of the measuring means is below a first predetermined level the brightness level is varied in one direction and if the output of the measuring means is above a second predetermined level the brightness level is varied in another direction.

公开(公告)号：BR7804994A

公开(公告)日：1979-04-17

申请号：BR7804994

申请日：1978-08-03

Applicant: IBM

Inventor： PFEIFFER H

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/30 ,  H01J31/08 ,  H01L21/26

公开(公告)号：BR7504789A

公开(公告)日：1976-07-06

申请号：BR7504789

申请日：1975-07-25

Applicant: IBM

Inventor： HALL A ,  PERKINS M ,  PFEIFFER H ,  WEBER E ,  WOODARD O

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J3/00

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.