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公开(公告)号：BR7801031A
公开(公告)日：1978-12-12
申请号：BR7801031
申请日：1978-02-21
Applicant: IBM
Inventor： RYAN P , PFEIFFER H , WEBER E
IPC: H01J37/147 , H01J37/09 , H01J37/30 , H01L21/027 , H01L27/00
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