公开(公告)号：DE2315795A1

公开(公告)日：1973-11-08

申请号：DE2315795

申请日：1973-03-29

Applicant: IBM

Inventor： PHILBRICK JOHN WHITNEY ,  PILLUS CHARLES ANTHONY ,  POPONIAK MICHAEL ROBERT ,  SCHNEIDER CHRISTIAN PAUL

IPC: G01R27/00 ,  G01N27/02 ,  G01R27/02 ,  H01L21/66 ,  G01R31/26

Abstract: The apparatus and technique discloses a method for measuring the resistivity of semiconductor material over several decades by varying the inductance of a RF energized coil and where the method is significantly independent of operating frequency, type of semiconductor material and the nature of the sample surface and surface and surface condition or preparation.