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公开(公告)号：DE3568513D1
公开(公告)日：1989-04-06
申请号：DE3568513
申请日：1985-04-17
Applicant: IBM
Inventor： CHEN LEE , HENDRICKS CHARLES JOSEPH , MATHAD GANGADHARA SWAMI , POLONCIC STANLEY JOHN
IPC: H01L21/302 , H01J37/32 , H01L21/00 , H01L21/3065 , H01L21/306
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