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公开(公告)号：JPS62191460A
公开(公告)日：1987-08-21
申请号：JP200387
申请日：1987-01-09
Applicant: IBM
Inventor： HAABAATO RUDORUFU ANDAASON JIY , KONSUTANSU JIYOON ARAPUSU , RENAKA SHIYASUTORI DEIBUAKARUN , DANIERU PATORITSUKU KAABII , ROBAATO UORUFU NIYUFUAA , HAABANSU SHIN SACHIDEBU , KURISHIYUNA GANJII SACHIDEBU , TAABA SARIYANARAYANA , SUTOOYAN MASHIASU ZARAA
IPC: C03C10/00 , C04B35/622 , C04B35/628 , C04B35/63 , C04B35/632 , C04B35/634 , H01L21/48 , H05K1/03
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