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公开(公告)号：DE1564170A1
公开(公告)日：1970-10-15
申请号：DE1564170
申请日：1966-08-16
Applicant: IBM
Inventor： BILOUS OREST , ROBERT MEULEMANS DARRELL , PHILIP PECORARO RAYMOND , CRANSTON SCLBY MICHAEL
IPC: H01L29/73 , H01L21/00 , H01L21/331 , H01L23/485 , H01L27/00 , H01L29/00 , H01L29/861 , H01L3/00
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