公开(公告)号：US3674004A

公开(公告)日：1972-07-04

申请号：US3674004D

申请日：1969-12-30

Applicant: IBM

Inventor： GRANDIA JOHANNES ,  ROHR ROBERT LEWIS

IPC: B26D1/553 ,  B26D1/547 ,  B28D5/04 ,  H01L21/301

CPC classification number: B28D5/042

Abstract: A precision cutting apparatus including a cutting tool which consists of at least a single flexible cutting element and means coacting with said cutting element for holding it in a rigid, unstressed condition is disclosed. The flexible cutting element is ordinary spring steel while the means for holding the cutting element in a rigid, unstressed condition is a block of dimensionally-stable pyrolytic graphite containing a groove in which the spring steel cutting element is receivable. Also disclosed, is translation means for applying rectilinear motion to the cutting tool, and a means for aligning the work piece relative to the cutting tool. The grooved graphite block, in addition to providing a dimensionally stable holder, also provides a porous material into which an adhesive may be introduced to retain the cutting element within the grooves. Heating the graphite block liquefies an appropriate adhesive and permits the removal of an old cutting element and its replacement with a new cutting element. A method of operating the cutting apparatus is also shown including an alignment step which permits extremely precise cutting. The apparatus and method taught have particular utility in the semiconductor area where the ability to dice with great precision, for example, greatly enhances the yield of usable semiconductor chips.

Abstract translation: 公开了一种精密切割设备，其包括由至少一个柔性切割元件组成的切割工具和与所述切割元件共同作用的装置，用于将其保持在刚性的无应力状态。 柔性切割元件是普通弹簧钢，而用于将切割元件保持在刚性的无应力状态的装置是包含能够接收弹簧钢切割元件的凹槽的尺寸稳定的热解石墨块。 还公开了用于对切割工具施加直线运动的平移装置和用于使工件相对于切割工具对准的装置。 开槽石墨块除了提供尺寸稳定的保持器之外，还提供多孔材料，粘合剂可以引入其中以将切割元件保持在槽内。 加热石墨块可以液化适当的粘合剂，并允许使用新的切割元件去除旧的切割元件并进行更换。 还示出了操作切割装置的方法，其包括允许非常精确的切割的对准步骤。 所教导的装置和方法在半导体领域具有特别的用途，其中例如极大地精确地骰子的能力大大提高了可用的半导体芯片的产量。

公开(公告)号：DE2613228A1

公开(公告)日：1976-11-18

申请号：DE2613228

申请日：1976-03-27

Applicant: IBM

Inventor： HOFFMANN ARTHUR ROWLAND ,  KENDALL ARTHUR HARRY ,  ROHR ROBERT LEWIS

IPC: C03B23/047 ,  C03B23/08 ,  B41J3/04

公开(公告)号：DE3463626D1

公开(公告)日：1987-06-19

申请号：DE3463626

申请日：1984-11-16

Applicant: IBM

Inventor： MACINNES ROBERT DONALD ,  PERIU CARLOS CESAR ,  ROHR ROBERT LEWIS

IPC: H05K3/34 ,  B23K1/008 ,  B23K1/012 ,  B23K31/02 ,  F27D7/06 ,  B23K3/04

Abstract: An improved apparatus and method are disclosed for heating objects, such as electronic chips being bonded to substrates, in which a copper heat exchanger element (12) comprises a circuitous interior passage (26) through which gases pass from a source (30) to be heated by a heater (74) to a desired temperature and to be cleansed of unwanted oxygen by catalytic reaction, prior to entering a furnace chamber (22) heated from below by the heat exchanger element (12) and from above by a further heater (72) and copper plate (60), whereby essentially uniform gas temperature, acceptably low oxygen concentration and fast cycling times are provided in the furnace chamber (22).