公开(公告)号：JPS6042652A

公开(公告)日：1985-03-06

申请号：JP9578984

申请日：1984-05-15

Applicant: IBM

Inventor： GEIRII YUUJIN ADAMUSU ,  JIYON MASHIYUU KIYASUPAA ,  ROI JIYON GURITSUTAA

IPC: G01N30/74 ,  G01N30/84

Abstract: Effluent from an LC is passed through a thermospray nozzle which flash vaporizes substantially all of the solvent while directing any sample components as a collimated beam onto a moving tape so that the various components form spots on the tape. The tape is moved along a path that intercepts the optical path of an FTIR spectrometer whereby IR energy from the spectrometer is passed through each sample component and is then spectrally analyzed. The tape can be wound up, stored, and later used for further analysis of the spots, as desired, in the FTIR spectrometer.

公开(公告)号：JPS5842041A

公开(公告)日：1983-03-11

申请号：JP10148182

申请日：1982-06-15

Applicant: IBM

Inventor： JIEEMUZU EKONOMII ,  ROI JIYON GURITSUTAA ,  HIROYUKI HIRAOKA

IPC: G03C1/72 ,  C08G8/00 ,  G03F7/039

Abstract: A positive working electron beam resist comprising a resinous condensation product of formaldehyde with a phenol or a cresol having a chloro substituent ortho to the hydroxyl group on its aromatic ring is imagewise exposed to electron beam irradiation and then the exposed portion of the resist is dissolved away to leave a petterned mask.