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公开(公告)号：SG106602A1
公开(公告)日：2004-10-29
申请号：SG200100992
申请日：2001-02-21
Applicant: IBM
Inventor： GERALD G ADVOCATE JR , FRANCIS J DOWNES JR , LUIS J MATIENZO , RONALD A KASCHAK , JOHN STEVEN KRESGE , DANIEL C VAN HART
IPC: C23C18/18 , C25D7/00 , H01L21/60 , H01L23/498 , H01L23/522 , H05K1/11 , H05K3/00 , H05K3/02 , H05K3/06 , H05K3/38 , H05K3/42 , H05K3/46 , H01L21/461 , H01L23/52
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