CIRCUIT CARD HAVING A PLURALITY OF VOLTAGE FACES AND A PLURALITY OF SIGNAL FACES

    公开(公告)号:JP2000174441A

    公开(公告)日:2000-06-23

    申请号:JP30748199

    申请日:1999-10-28

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To form a chip carrier having two voltage faces and at least two signal faces by exposing a first layer made of dielectric material attached to a first metal layer to form openings which pass through the first layer. SOLUTION: A first layer 10 made of dielectric material is attached to a first metal layer 12 and then the first layer 10 is exposed to form openings which pass through the first layer 10. Then, a second metal layer 16 is attached to the first layer 10 and holes larger than corresponding opening patterns of the first layer 10 are formed by etching in the first and the second metal layer 12, 16 in correspondence to each opening pattern and then an exposure pattern on the first layer 10 is developed. The openings formed in the first and the second metal layer are larger than those of the first layer 10. Then, a second and a third layer 32, 34 which are capable of light image formation are attached to the first and the second metal layer 12, 16 respectively and then are formed into light patterns and developed to form openings corresponding to each hole of the first layer 10 in the second and the third layer 32, 34. Then, the first and the second metal layer 12, 16 are formed with holes which are terminated at the metal layer in the lower layer. Parts of the surfaces of the second and the third dielectric material are exposed and holes are filled with plating or metal.

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