公开(公告)号：US3449049A

公开(公告)日：1969-06-10

申请号：US3449049D

申请日：1966-01-14

Applicant: IBM

Inventor： HARDING WILLIAM E ,  PERRI JOHN A ,  RISEMAN JACOB ,  RUDER WINFIELD S

IPC: G03B27/32 ,  G03B19/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03B27/42

CPC classification number: G03F7/70475 ,  G03B19/023

公开(公告)号：CA851895A

公开(公告)日：1970-09-15

申请号：CA851895D

Applicant: IBM

Inventor： HARDING WILLIAM E ,  PERRI JOHN A ,  RUDER WINFIELD S ,  RISEMAN JACOB

公开(公告)号：CA1013050A

公开(公告)日：1977-06-28

申请号：CA188760

申请日：1973-12-21

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  LEOFF ARKADY ,  MURPHY JOHN J ,  RUDER WINFIELD S

IPC: B25J9/16 ,  B23Q41/02 ,  B66C13/22 ,  H01L21/00 ,  H01L21/677

Abstract: A material transfer apparatus which includes a carriage whose movement is controlled along a path between specified locations thereon. The carriage includes means for dynamically indicating its present location on the path which is compared with a specified new location to provide a difference drive for moving the carriage as required. When a new location for the carriage is specified, it is dispatched under control of a cross-positioning means to approximate location of the new position whereby a sensing means on the carriage senses the carriage's approach to an indicator at the specified location, whereby control of the movement of the carriage is transferred to a fine positioning drive to accurately register the carriage with the specified location along the track.